JPS5859618A - 弾性表面波素子 - Google Patents

弾性表面波素子

Info

Publication number
JPS5859618A
JPS5859618A JP15759581A JP15759581A JPS5859618A JP S5859618 A JPS5859618 A JP S5859618A JP 15759581 A JP15759581 A JP 15759581A JP 15759581 A JP15759581 A JP 15759581A JP S5859618 A JPS5859618 A JP S5859618A
Authority
JP
Japan
Prior art keywords
single crystal
surface acoustic
acoustic wave
aluminum nitride
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15759581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249566B2 (en]
Inventor
Nobuo Mikoshiba
御子柴　宣夫
Kazuo Tsubouchi
和夫 坪内
Kazuyoshi Sukai
須貝　和義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP15759581A priority Critical patent/JPS5859618A/ja
Publication of JPS5859618A publication Critical patent/JPS5859618A/ja
Publication of JPH0249566B2 publication Critical patent/JPH0249566B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP15759581A 1981-10-05 1981-10-05 弾性表面波素子 Granted JPS5859618A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15759581A JPS5859618A (ja) 1981-10-05 1981-10-05 弾性表面波素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15759581A JPS5859618A (ja) 1981-10-05 1981-10-05 弾性表面波素子

Publications (2)

Publication Number Publication Date
JPS5859618A true JPS5859618A (ja) 1983-04-08
JPH0249566B2 JPH0249566B2 (en]) 1990-10-30

Family

ID=15653139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15759581A Granted JPS5859618A (ja) 1981-10-05 1981-10-05 弾性表面波素子

Country Status (1)

Country Link
JP (1) JPS5859618A (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59231911A (ja) * 1983-06-14 1984-12-26 Clarion Co Ltd 表面弾性波素子
JPH0388406A (ja) * 1989-04-11 1991-04-12 Sanyo Electric Co Ltd 弾性表面波素子
KR100438467B1 (ko) * 1999-07-29 2004-07-03 루센트 테크놀러지스 인크 박막 공진기 장치 및 이의 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778206A (en) * 1980-11-04 1982-05-15 Nobuo Mikoshiba Surface acoustic wave element and its production

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778206A (en) * 1980-11-04 1982-05-15 Nobuo Mikoshiba Surface acoustic wave element and its production

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59231911A (ja) * 1983-06-14 1984-12-26 Clarion Co Ltd 表面弾性波素子
JPH0388406A (ja) * 1989-04-11 1991-04-12 Sanyo Electric Co Ltd 弾性表面波素子
US5059847A (en) * 1989-04-11 1991-10-22 Sanyo Electric Co., Ltd. Surface acoustic wave device
KR100438467B1 (ko) * 1999-07-29 2004-07-03 루센트 테크놀러지스 인크 박막 공진기 장치 및 이의 제조 방법

Also Published As

Publication number Publication date
JPH0249566B2 (en]) 1990-10-30

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